World’s first ‘lab-in-fab’ for piezo-MEMS technology to set up shop in Singapore
28 Oct 2020, 06:06 pm
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SINGAPORE (Oct 28): In a world first, US-listed global semiconductor and micro-electromechanical system (MEMS) technology leader ST Microelectronics has announced a collaboration with A*Star’s IME research institute and leading Japanese manufacturing-tool vendor ULVAC to jointly establish an eight-inch (200mm) R&D line focused on Piezo MEMS technology within ST’s existing manufacturing facility in Singapore. 

Piezo-based components are widely used to build actuators or sensors out of bulk piezo materials. Innovations in process technologies have allowed the MEMS industry to design and manufacture wafer-level products using thin piezo films. The development of such technology promises to drive the miniaturisation of actuators while driving performance improvements and cost reduction at the same time.  

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